DPS系列干式螺桿真空泵

功????率：2.98～8.94KW

氣????量：80～1800m3/hr

排氣壓力：≤1/≤0.1 Pa

傳動方式：280～545KG

冷卻方式：≤68DB(A)

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產品信息

參數列表

產品應用

DPS系列干式螺桿真空泵特點：

排氣路徑短，減少反應物沉積/Exhaust Path Is Short, Reduce The Deposition Of Reactants.

●干式螺旋真空泵相較于其他形式的真空泵，因氣體于泵浦內的傳輸路徑更短，更不易產生反應物沉積的現象/Comparing with other types of dry vacuum pump,DENAIR screw vacuum pump has the shortest gas path in the vacuum pump and that could reduce the contamination of process gas. Screw rotors can play as a powder transmission mechanism,we runs well even there has lots of contamination inside the pump.

線形密封性佳，泵浦性能更優/The Optimal Linear Sealing, The Pump Performance

●專利轉子密封線形，轉子密封性佳，轉子能以較大的嚙合間隙達到更快的抽氣效果。由于嚙合間隙較大，泵浦較不易因制程氣體沉積而卡死，轉子也較不易因麿耗而需更換/Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between.Pump rotor wesring and rotor jam by the process contamination can be reduced by larger allowable clearcance.

結構簡單，故障率低，維修容易/Simple Structure, Low Fault Rate And Easy Maintenance

●螺旋式真空泵因需利用一對轉子互相嚙合達到密封效果，結構上不像其他形式的真空泵需要有中間隔板的設計，降低轉子與隔板沉積卡死的風險。且因其結構單純，拆解維修也較容易，因此能縮短維修時程，降低維修費用/Screw type vacuum is composed by a pair of screw rotor and isolation plates are required in different between rotors and isolation plates can also be avoided.Overhaul Hanbell dry pump is much easier than other type of dry pump,so the erpair time is shorter and the cost is saver.

微電腦操作，遠端監控，保護周全/Microcomputer Operation, Remote Monitoring, Considerate Protection

●微電腦操控器提供真空泵浦更簡單的操作方式并能顯示泵浦完整的運轉狀態，方便使用者對泵浦應用狀況進行調整，在泵浦產生問題前進行預防保養。遠端監控系統能提供使用者方便的監控工具，使用者不需到現場即能查詢泵浦之運轉狀況/Microprocessor controller provides lots of pump parameters for running status monitoring.Pump can be easily operated and monitored by the operation panel.Remote control software can help the customer monitor the pump running status remotely.

性能優勢：

●專用冷卻液冷卻，避免了冷卻水可能對殼體造成腐蝕/Special cooling liquid cooling, to avoid the cooling water may cause corrosion to the hull.

●移動式操作界面，方便操作；顯示真空泵實際工作狀況，并可選中英兩種文字顯示，切實貼近客戶/Mobile operation interface, convenient operation; Display and the actual work of vacuum pump and can be selected to both languages, according to the real close to the customer.

●軍規電源接頭，安全方便/Catch the power connector, safe and convenient.

●氮氣加熱器，使真空泵更適應于CVD、PECVD等半導體制程/The nitrogen gas heater, make the vacuum pump is more suitable for CVD, PECVD and other semiconductor technique process.

●控制訊號及通訊信號接口，可對真空泵進行遠端監控/The control signals and communication signal interface, remote monitoring was carried out on the vacuum pump.


型　號 Model		單位	單機Pump Unit			機組Pump Set
型　號 Model		單位	DPS80	DPS160	DPS180	DPS602	DPS902	DPS1302	DPS1802
抽速(50HZ/60HZ)		L/min	1300/1600	2150/2600	2500/3000	8300/10000	12500/15000	17500/20000	25000/33300
		m³/hr	80/96	140/156	150/180	500/600	750/900	1050/1260	1500/1800
		cfm	48/57	82/92	88/105	294/353	441/530	618/742	883/1060
終極壓力		Torr	≤7.5*10-³			≤7.5*10-⁴
		mbar	≤1*10-²			≤1*10-³
		Pa	≤1			≤0.1
馬達	頻率	HZ	50/60
	電壓	V	220～440
	功率	Hp	4	6	6	4+4	6+4	6+6	6+6
	功率	KW	2.98	4.47	4.47	2.98+2.98	4.47+2.98	4.47+4.47	4.47+4.47
連接	進氣口		NW50			ISO100		ISO160
連接	排氣口		NW40
冷卻水	流量	L/min	3～7
	壓力	kg/cm²	2.0～4.0
	溫度	℃	18～30			15～30
	接頭		RC3/8²
氮氣N₂	壓力	Mpa	0.15～0.2/td>
	稀釋流量	L/min	0-60
	密封流量	L/min	0-20
	接頭		Swagelok1/4²
尺寸(L×W×H)		mm	814×380×663	895×405×678	920×425×650	814×380×865	895×380×915	920×430×957	920×430×1030
重量		kg	280	300	320	450	520	540	545
噪音		dB(A)	≤68	≤70	≤70	≤70	≤70	≤70	≤70
			備注：1、以上噪音值為搭配水冷電機無外罩之噪音值。2、以上機型如裝隔音裝置可再有效降低噪音3～4分貝 Note：1、above the noise value is with water-cooled motor no outer garment of noise value.2、the above models,such as sound insulation devioe can effectively redoue the noise 3-4db.
控制界面			SEMI E73-0299
室溫操作范圍		℃	5～40
更大操作濕度		RH	90%以上Above